1. Plasma enhanced chemical vapor deposition system (PECVD)
 

 
2. Atomic layer deposition system (ALD)
 

 

 
3. Sputtering system
 

4. Low pressure chemical vapor deposition system (LPCVD)
 

5. E-beam evaporation system
 

6. Laser spectroscopy system
 

 

 
7. Current-Voltage measurement system
 

 
8. Photolithography system
 

 

 
9. Field-emission scanning electron microscope (SEM)
 

 
 
 
 
 
 
 
 
 
 
 
Tel : +886-4-23590121 ext. 32141, 32150
Fax: +886-4-23594643
Contact H-L Hsiao

Laboratoty of Advanced Materials for Photonics and Electronics (LAMPS),
P.O. Box 5-803,
Department of Applied Physics,
Tunghai University,
407 Taichung, TAIWAN